Back-illuminated large-format Loral CCDs

Details Back-illuminated large-format Loral CCDs Back-illuminated large-format Loral CCDs

Jul 1991

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1991spie.1447..177l&link_type=abstract

Proc. SPIE Vol. 1447, p. 177-182, Charge-Coupled Devices and Solid State Optical Sensors II, Morley M. Blouke; Ed.

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The authors use charge-coupled devices (CCDs) from a lot of Loral wafers containing 3072 X 1024 and 800 X 1200 pixel detectors. These CCDs were specifically designed for astronomical spectrographic applications with the intention of thinning them at Steward Observatory for backside illumination. The thinning procedure and how it relates to the packaging method developed to keep the devices flat for use in fast optical beams are described. Initial results with a new oxidation procedure to allow better backside charging is also described. This oxidation method is especially effective with biased gate-charging techniques which apply a voltage directly over the backside oxide.

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