Virtual-phase charge-coupled device image sensors for industrial and scientific applications

Statistics – Applications

Scientific paper

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Scientific paper

A family of VP CCD image sensors for different industrial and scientific applications was designed, fabricated, and tested. All of them share the common concept of a 2.5-phase photosensitive cell, combining the advantages of known 1.5-phase VP devices (reduced dark current and increased quantum efficiency) with simpler fabrication process and extended functions.

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