Physics – Condensed Matter – Materials Science
Scientific paper
2004-07-20
Physics
Condensed Matter
Materials Science
11 pages, 3 figures with 7 subfigures revised for submission to Surface Science
Scientific paper
10.1016/j.susc.2005.06.087
Steps with spacings of microns form on top of mesas fabricated on Si(111) that is annealed at temperatures where sublimation becomes important. Upon annealing, mesas first develop ridges along their edges, effectively creating craters which then become step-free by a step flow process described in the literature. Due to the miscut of the average surface from (111), ridge breakdown occurs on one edge of each mesa as sublimation proceeds. The breakdown point then acts as a source of steps which spread out over the mesa surface. The distribution of steps in the resulting step train depends on the sublimation rate, direct step-step interaction and the diffusive exchange of atoms among the steps. Computer simulations using BCF (Burton, Cabrera and Frank) theory provide insight into the controlling processes. The results suggest that self-organization of the wide terrace distributions in the low step density area occurs under sublimation. We compare the experimental and predicted step distributions.
Blakely Jack M.
Chang Kee-Chul
No associations
LandOfFree
Arrays of widely spaced atomic steps on Si(111) mesas due to sublimation does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Arrays of widely spaced atomic steps on Si(111) mesas due to sublimation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Arrays of widely spaced atomic steps on Si(111) mesas due to sublimation will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-143086