Application of Semiconductor Industry Cleaning Technologies for Genesis Sample Collectors

Details Application of Semiconductor Industry Cleaning Technologies for Genesis Sample Collectors Application of Semiconductor Industry Cleaning Technologies for Genesis Sample Collectors

Mar 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006lpi....37.1878s&link_type=abstract

37th Annual Lunar and Planetary Science Conference, March 13-17, 2006, League City, Texas, abstract no.1878

Physics

4

Scientific paper

Genesis array collectors recovered after the sub-nominal landing have
been exposed to particulate and molecular contamination. In this study,
semiconductor industry based cleaning technologies are being evaluated
for their efficacy in contaminant removal.

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