Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

Details Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

2011-06-07

arxiv.org/abs/1106.1327v1

MRS Symp. Proc., 378 (1995) 615-620

Physics

Condensed Matter

Materials Science

MRS Spring Meeting, San Francisco, USA, 17-21 April 1995

Scientific paper

Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics

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