An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas

Details An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas

2003-06-17

arxiv.org/abs/cond-mat/0306452v1

Physics

Condensed Matter

Materials Science

6 pages, 8 figures, accepted for publication in Rev. Sci. Instrum

Scientific paper

10.1063/1.1602962

A new method for continuous compositional-spread (CCS) thin-film fabrication based on pulsed-laser deposition (PLD) is introduced. This approach is based on a translation of the substrate heater and the synchronized firing of the excimer laser, with the deposition occurring through a slit-shaped aperture. Alloying is achieved during film growth (possible at elevated temperature) by the repeated sequential deposition of sub-monolayer amounts. Our approach overcomes serious shortcomings in previous in-situ implementations of CCS based on sputtering or PLD, in particular the variations of thickness across the compositional spread and the differing deposition energetics as function of position. While moving-shutter techniques are appropriate for PLD-approaches yielding complete spreads on small substrates (i.e. small as compared to distances over which the deposition parameters in PLD vary, typically about 1 cm), our method can be used to fabricate samples that are large enough for individual compositions to be analyzed by conventional techniques, including temperature-dependent measurements of resistivity and dielectric and magnetic and properties (i.e. SQUID magnetometry). Initial results are shown for spreads of (Sr,Ca)RuO$_3$.

Affiliated with

Also associated with

No associations

Rating

An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-50485