"Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept

Details "Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept "Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept

2012-01-13

arxiv.org/abs/1201.2873v1

Physics

Fluid Dynamics

Scientific paper

We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 \mu m thick aluminum cantilever is actuated using an ordinary white light source. A deflection of 56 \mu m is observed using a light irradiance equal to \approx 1000 W m-2 at a bias of 7 V. The deflection of the cantilever relies on the recently observed photoelectrowetting effect [Sci. Rep.1, 184 (2011)]. Such "actuation at a distance" could be useful for optical addressing and control of autonomous wireless sensors, MEMS and microsystems.

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