Active microcantilevers based on piezoresistive ferromagnetic thin films

Details Active microcantilevers based on piezoresistive ferromagnetic thin films Active microcantilevers based on piezoresistive ferromagnetic thin films

2010-12-10

arxiv.org/abs/1012.2330v1

Appl. Phys. Lett. 98, 013502 (2011)

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

10 Pages, 3 Figures

Scientific paper

10.1063/1.3533390

We report the piezoresisitivity in magnetic thin films of FeGa and their use for fabricating self transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive property of FeGa thin films, while the deflection readout is achieved by exploiting the piezoresisitivity of these films. This self-sensing, self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated, cantilever-based sensors.

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