A user-friendly approach to local anodic oxidation

Details A user-friendly approach to local anodic oxidation A user-friendly approach to local anodic oxidation

2004-09-23

arxiv.org/abs/cond-mat/0409608v1

Physics

Condensed Matter

Materials Science

8 pages, 6 figures, submitted to Advanced Materials

Scientific paper

A home made DSP-controlled scanning probe microscope (SPM) system has been developed and its utilization as a tool for lithography on nanometer scale is reported. User-friendly graphic interface allows to directly perform nanolithography importing a bitmap pattern on previously-imaged sample region, otherwise moving in real time the probe using an ordinary mouse, acting as a pantograph from macroscopic down to nanometer scale, taking advantage from an absolute-positioning stage. Any measured property of the sample can be used by the lithographic interface to realize interactive patterning of the sample. Moreover, the 'contour-mode' permits to move tip at a fixed relative tip-sample distance, exploiting at each step the previously-acquired topographic signal. The instrument has been successfully employed in order to perform local anodic oxidation (LAO) lithography on semiconducting substrates.

Affiliated with

Also associated with

No associations

Rating

A user-friendly approach to local anodic oxidation does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with A user-friendly approach to local anodic oxidation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and A user-friendly approach to local anodic oxidation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-77370