A simple method for monitoring uniformity of epitaxial semiconductor structures

Details A simple method for monitoring uniformity of epitaxial semiconductor structures A simple method for monitoring uniformity of epitaxial semiconductor structures

2006-08-23

arxiv.org/abs/cond-mat/0608503v1

Physics

Condensed Matter

Materials Science

2 pages, 2 figures

Scientific paper

A simple method for visualization of nonuniformity of planar MBE structures
is proposed. The method is based on measuring the relief of the photo-EMF. The
method can be applied to a wide variety of semiconductor structures and does
not require any expensive equipment.

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