A Percolative Model of Soft Breakdown in Ultrathin Oxides

Physics – Condensed Matter

Scientific paper

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accepted for publication on Physica B

Scientific paper

10.1016/S0921-4526(01)01408-9

The degradation of ultrathin oxide layers in the presence of a stress voltage is modeled in terms of two antagonist percolation processes taking place in a random resistor network. The resistance and leakage current fluctuations are studied by MonteCarlo simulations for voltages below the breakdown threshold. An increase of excess noise together with a noticeable non-Gaussian behavior is found in the pre-breakdown regime in agreement with experimental results.

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