Physics – Optics
Scientific paper
Jan 1993
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..314v&link_type=abstract
In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San
Physics
Optics
Extreme Ultraviolet Radiation, Mirrors, Optical Reflection, Test Facilities, Ultraviolet Spectra, Continuous Radiation, Laminates, Laser Beams, Laser Target Interactions, Q Switched Lasers
Scientific paper
A test facility for measurements of reflectivity of multilayer coated mirrors, in the 30-300 A domain is described. The facility uses as a source of continuum radiation a plasma produced by focusing a laser beam on a target of high Z material. The laser used is a Q-switched Nd-YLF producing pulses of up to 20 J of energy and of 15 ns duration. The radiation reflected by the mirror under test is dispersed by a grazing incidence spectrograph and recorded with an intensified CCD detector. The facility is quite simple to operate and versatile. Examples of measurements from different mirrors in the range 50-130 A taken with the facility are presented.
Jannitti Ermanno
Naletto Giampiero
Nicolosi Piergiorgio
Tondello Giuseppe
Villoresi Paolo
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