Physics – Condensed Matter – Materials Science
Scientific paper
2008-05-02
Dans Micromachining, Micromechanics and Microsystems 2007 - Micromechancis Europe 2007, 18th Workshop on Micromachining, Micro
Physics
Condensed Matter
Materials Science
Site de la conf\'erence / Conference web site: http://dei-s1.dei.uminho.pt/mme07/
Scientific paper
A MEMS based tribometer has been developed that can be read out with nanometer and nano-Newton resolution, approaching the resolution and sensitivity of a friction force microscope (FFM). It can be used to study friction of MEMS device sidewall surfaces. We find repeatable but irregular stick-slip behavior related to the surface roughness or surface modification (wear), depending on the normal force between the sliding surfaces. In addition, we show that normal force modulation can decrease the apparent friction even though the average normal force remains the same. This may be a technologically viable way to reduce friction and wear in microscopic contacts.
Frenken Joost J. W. M.
Turq Viviane
Van Spengen Merlijn W. M.
Wijts Geert G. H. C. J.
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