Physics – Condensed Matter – Mesoscale and Nanoscale Physics
Scientific paper
2007-03-08
IEEE Electron Device Letters, Vol. 28, No. 4, April 2007
Physics
Condensed Matter
Mesoscale and Nanoscale Physics
12 pages, 3 figures
Scientific paper
10.1109/LED.2007.891668
In this letter, a top-gated field effect device (FED) manufactured from monolayer graphene is investigated. Except for graphene deposition, a conventional top-down CMOS-compatible process flow is applied. Carrier mobilities in graphene pseudo-MOS structures are compared to those obtained from top-gated Graphene-FEDs. The extracted values exceed the universal mobility of silicon and silicon-on-insulator MOSFETs.
Baus Marc
Echtermeyer T. J.
Kurz Heinrich
Lemme Max C.
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