A Fluid Dynamics Calculation of Sputtering from a Cylindrical Thermal Spike

Details A Fluid Dynamics Calculation of Sputtering from a Cylindrical Thermal Spike A Fluid Dynamics Calculation of Sputtering from a Cylindrical Thermal Spike

2001-09-13

arxiv.org/abs/cond-mat/0109225v1

Physics

Condensed Matter

Materials Science

10 pages, 9 pages (including 9 figures), submitted to PRB

Scientific paper

10.1103/PhysRevB.65.165425

The sputtering yield, Y, from a cylindrical thermal spike is calculated using a two dimensional fluid dynamics model which includes the transport of energy, momentum and mass. The results show that the high pressure built-up within the spike causes the hot core to perform a rapid expansion both laterally and upwards. This expansion appears to play a significant role in the sputtering process. It is responsible for the ejection of mass from the surface and causes fast cooling of the cascade. The competition between these effects accounts for the nearly linear dependence of $Y$ with the deposited energy per unit depth that was observed in recent Molecular Dynamics simulations. Based on this we describe the conditions for attaining a linear yield at high excitation densities and give a simple model for this yield.

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