Angular Properties of Xe+-Sputtered Molybdenum at Low Impingement Energy

Physics

Scientific paper

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Scientific paper

The angular properties of sputtered molybdenum have not been previously measured for impinging ions with energy below 1 keV. The 0.2 - 1 keV energy range is very relevant for currently operational gridded ion thrusters, and exhibits high dependence on angles of incidence and emission as well as incident energy. To address this problem, the Doppler profiles and relative density of molybdenum atoms sputtered from a small, rotatable target by an independently rotatable ion source were determined by laser-induced fluorescence, the first study of its type for the molybdenum element. The profiles were obtained for various emission angles about the target normal as well as for multiple angles of incidence, and ion impingement energies of 250 and 550 eV. The velocity distributions obtained at each incidence angle, field angle, and beam energy were well-fitted to a Thompson distribution. The fitting- parameter trends are discussed with reference to angles of incidence and emission, and the impingement energy.

No associations

LandOfFree

Say what you really think

Search LandOfFree.com for scientists and scientific papers. Rate them and share your experience with other people.

Rating

Angular Properties of Xe+-Sputtered Molybdenum at Low Impingement Energy does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Angular Properties of Xe+-Sputtered Molybdenum at Low Impingement Energy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Angular Properties of Xe+-Sputtered Molybdenum at Low Impingement Energy will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFWR-SCP-O-840438

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.