Defects of Ge quantum dot arrays on the Si(001) surface

Details Defects of Ge quantum dot arrays on the Si(001) surface Defects of Ge quantum dot arrays on the Si(001) surface

2009-08-06

arxiv.org/abs/0908.0841v1

Physica B 404 (2009) 4719--4722

Physics

Condensed Matter

Materials Science

Reported at the 25th International Conference on Defects in Semiconductors, St. Petersburg, Russia, July 20-24, 2009

Scientific paper

10.1016/j.physb.2009.08.118

Defects of Ge quantum dot arrays may affect the electrophysical, photoelectrical or optical properties of Ge/Si heterostructures as well as the functionality of devices produced on their basis. The defects of Ge quantum dot arrays formed at moderate temperatures on the Si(001) surface have been investigated by the ultra high vacuum scanning tunnelling microscope integrated with the molecular beam epitaxy chamber. A preliminary classification of the defects has been carried out. Morphological peculiarities of the defects have been studied. The surface densities of defects of different types have been determined.

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