Physics – Condensed Matter – Materials Science
Scientific paper
1997-12-12
Appl. Phys. Lett., vol. 71, no. 12, p. 1736 (1997)
Physics
Condensed Matter
Materials Science
6 pages, 3 figures; for color versions of figures see www.csr.umd.edu/research/hifreq/micr_microscopy.html
Scientific paper
10.1063/1.120020
We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant frequency, allowing measurements with a sensitivity to frequency shifts as small as one parts in 50000 for a 30 ms sampling time. The frequency shifts can be converted to sheet resistance based on a simple model of the system.
Anlage Steven M.
Dutta Sudeep K.
Steinhauer D. E.
Vlahacos C. P.
Wellstood Frederick C.
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