The role of stress and diffusion in structure formation in semiconductors

Details The role of stress and diffusion in structure formation in semiconductors The role of stress and diffusion in structure formation in semiconductors

2005-09-21

arxiv.org/abs/cond-mat/0509532v1

Physics

Condensed Matter

Materials Science

157 pages, PhD dissertation

Scientific paper

This dissertation addresses two aspects of the theory and simulation of stress-diffusion coupling in semiconductors. The first part is a study of the role of kinetics in the formation of pits in stressed thin films. The second part describes how atomic-scale calculations can be used to extract the thermodynamic and elastic properties of point-defects. For both aspects, there exists an interaction between phenomena at the atomic and macroscopic scales and the formation of both point-defects and surface features depends on the stress state of the system.

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