Electrically Detected Magnetic Resonance Applied to the Study of Near Surface Electron Donors in Silicon

Physics – Condensed Matter – Materials Science

Scientific paper

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4 pages, 3 figures, 34th ANZIP condensed matter and materials meeting 2010

Scientific paper

Electrically detected magnetic resonance (EDMR) is applied to mm size devices
with implanted leads and a 50 micron square gap laid down on bulk phosphorus
doped silicon. Devices with a range of phosphorus concentrations and surface
types were prepared and measured to examine the interplay between donor and
charge trap states in producing EDMR signals.

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