Thermoelastic Damping in Micro- and Nano-Mechanical Systems

Details Thermoelastic Damping in Micro- and Nano-Mechanical Systems Thermoelastic Damping in Micro- and Nano-Mechanical Systems

1999-09-17

arxiv.org/abs/cond-mat/9909271v1

Phys. Rev. B 61, 5600 (2000).

Physics

Condensed Matter

Mesoscale and Nanoscale Physics

10 pages. Submitted to Phys. Rev. B

Scientific paper

10.1103/PhysRevB.61.5600

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electro-mechanical systems (MEMS and NEMS). The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener's well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.

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