Physics – Condensed Matter – Materials Science
Scientific paper
2006-10-09
Physics
Condensed Matter
Materials Science
7 pages, 3 figures, 1 table, submitted to JAP, fig1a,1b are excluded do to size limit problem (can be seen at http://www.mfa
Scientific paper
The ion-sputtering induced intermixing is studied by Monte-Carlo TRIM, molecular dynamics (MD) simulations, and Auger electron spectroscopy depth profiling (AES-DP) analysis in Pt/Ti/Si substrate (Pt/Ti) and Ta/Ti/Pt/Si substrate (Ti/Pt) multilayers. Experimental evidence is found for the asymmetry of intermixing in Pt/Ti, and in Ti/Pt. In Ti/Pt we get a much weaker interdiffusion than in Pt/Ti. The unexpected enhancement of the interdiffusion of the Pt atoms into the Ti substrate has also been demonstrated by simulations. We are able to capture the essential features of intermixing using TRIM and MD simulations for ion-beam sputtering and get reasonable values for interface broadening which can be compared with the experimental measurements. However, the origin of the asymmetry remains poorly understood yet.
Egelhoff W. F. Jr.
Kótis L.
Lábár János
Menyhárd M.
Süle Péter
No associations
LandOfFree
Asymmetric intermixing in Pt/Ti does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Asymmetric intermixing in Pt/Ti, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Asymmetric intermixing in Pt/Ti will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-342778