High quality superconducting niobium films produced by Ultra High Vacuum Cathodic Arc

Details High quality superconducting niobium films produced by Ultra High Vacuum Cathodic Arc High quality superconducting niobium films produced by Ultra High Vacuum Cathodic Arc

2004-09-10

arxiv.org/abs/cond-mat/0409271v1

Supercond. Sci. Technol. 18 (2005) L41--L44

Physics

Condensed Matter

Superconductivity

submitted to APL

Scientific paper

10.1088/0953-2048/18/7/L01

The vacuum arc is a well-known technique to produce coating with enhanced adhesion and film density. Many cathodic arc deposition systems are actually in use in industry and research. They all work under (high) vacuum conditions in which water vapor pressure is an important source of film contamination, especially in the pulsed arc mode of operation. Here we present a Cathodic Arc system working under Ultra High Vacuum conditions (UHVCA). UHVCA has been used to produce ultra-pure niobium films with excellent structural and electrical properties at a deposition temperature lower than 100oC. The UHVCA technique therefore opens new perspectives for all applications requiring ultra-pure films or, as in the case of Plasma Immersion Ion Implantation, ultra-pure plasmas.

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