Automated Foucault test for focus sensing

Physics – Optics

Scientific paper

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Aberration, Automatic Test Equipment, Image Processing, Optical Measuring Instruments, Point Sources, Self Focusing, Astigmatism, Geometrical Optics, Imaging Techniques, Optical Correction Procedure, Phase Detectors, Photosensitivity, Physical Optics, Position Errors, Servocontrol, Signal Processing, Wave Front Deformation

Scientific paper

A chopper wheel, a bicell photodetector, and an electronic phase detector are used in a mechanization of the Foucault optical test to obtain a linear focus error voltage for an isolated point image. Geometrical and diffraction analyses of the technique are included which show the sensitivity of the technique to aberrations of higher order than focus.

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