Physics
Scientist
Research group PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, 2610 Antwerp, Belgium
Behavior of electrons in a dual-magnetron sputter deposition system: a Monte Carlo model
Particle-in-cell/Monte Carlo collisions treatment of an Ar/O2 magnetron discharge used for the reactive sputter deposition of TiOx films
Reactive sputter deposition of TiNx films, simulated with a particle-in-cell/Monte Carlo collisions model
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