Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam

Details Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam

Feb 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011..464t&link_type=abstract

Proc. SPIE Vol. 2011, p. 464-475, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds

Physics

Optics

1

Scientific paper

We give an experimental study of soft x-ray diffraction by various laminar multilayer amplitude grating mirrors made by electron beam lithography. The +1, 0, -1 diffraction order efficiencies in the grating rule scan model and their positions were measured using synchrotron radiation on the Super-Aco at L.U.R.E in the X-UV region, particularly above the silicon L edge. These efficiencies were compared with values obtained in the detector scan mode. Their diffraction pattern were analyzed and discussed with a model. We describe a modular X-UV spectrogoniometer (0 - 20 goniometer).

Affiliated with

Also associated with

No associations

Rating

Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Performance of laminar-etched multilayer amplitude grating used with a synchrotron beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-957220