Physics – Optics
Scientific paper
Jun 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004esasp.554..687n&link_type=abstract
In: Proceedings of the 5th International Conference on Space Optics (ICSO 2004), 30 March - 2 April 2004, Toulouse, France. Ed.:
Physics
Optics
Space Optics, Mirrors
Scientific paper
A new technology is under development to grow layers of amorphous Silicon Carbide in vacuum at temperatures below 200°C by PE-CVD technology. The layers can be used either to improve the surface quality of mirror substrates, as a polishable cladding coating, or to form self-sustaining thin mirrors in SiC. The former application is useful in particular for the coating of some varieties of SiC materials that are not well polishable or that have high residual porosity, thus obtaining good CTE matching with the substrates. The latter application is very promising to get ultra-thin mirrors by replica, by growing layers of some tenths of millimetre on an optically polished master. The paper presents the preliminary results obtained with the two mentioned possible uses of the PE-CVD SiC process.
Citterio Oberto
Ghigo Mauro
Novella L.
Novi Andrea
Taglioni Geo
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