Investigation of a Diamond Deposition System

Details Investigation of a Diamond Deposition System Investigation of a Diamond Deposition System

Jan 1995

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1995phdt........10c&link_type=abstract

Thesis (PH.D.)--THE UNIVERSITY OF WISCONSIN - MADISON, 1995.Source: Dissertation Abstracts International, Volume: 56-07, Sectio

Physics

Hydrogen, Carbon, Methyl

Scientific paper

The gas phase of a hot filament diamond deposition system is studied using spectroscopy and numerical modeling. Very sensitive multi-channel absorption spectroscopy in the ultraviolet and single channel absorption spectroscopy in the vacuum ultraviolet are used to measure the densities of important species, including atomic hydrogen, atomic carbon, methyl radical, the CH radical, and acetylene, and to measure the gas temperature. The abstraction reactions between the single carbon hydrocarbons are found to be in thermal equilibrium, allowing the ratio of atomic and molecular hydrogen to be deduced from the hydrocarbon measurements. These measurements are used to supply the hydrogen dissociation ratio and gas temperature at the filament for a two dimensional model of the gas flow and reactions. The model shows that species transport is dominated by diffusion, that the temperature is dominated by conduction, and that the atomic hydrogen is not greatly affected by the gas phase reactions. The model and the measurements show that the hydrogen dissociation ratio depends on the degree of dissociation at the filament and recombination at the substrate and chamber walls. The hydrogen dissociation ratio determines the relative densities of the single carbon hydrocarbons.

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