Physics
Scientific paper
May 2002
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4748..472o&link_type=abstract
Proc. SPIE Vol. 4748, p. 472-475, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures, Ana
Physics
Scientific paper
The analytical and experimental investigations describing the intracavity processing of different solid-sate materials (Al, Cr, Ge, Si) are presented. New designs of the laser cavity were explored to facilitate the fabrication of structures composed of a system of equidistant parallel 250 nm-sized grooves and periodic micro-dots on massive samples of metals and semiconductors, as well as micro-holes in thin film metallic samples.
Osipov Vladimir P.
Valyavko Vasily V.
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