Micromachined Bolometer-Arrays with Silicon-Nitride Membranes

Details Micromachined Bolometer-Arrays with Silicon-Nitride Membranes Micromachined Bolometer-Arrays with Silicon-Nitride Membranes

Dec 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996esasp.388..111k&link_type=gif

Submillimetre and Far-Infrared Space Instrumentation, Proceedings of the 30th ESLAB Symposium held in Noordwijk, 24-26 September

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