Physics – Optics
Scientific paper
Dec 1998
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3443..128o&link_type=abstract
Proc. SPIE Vol. 3443, p. 128-136, X-Ray and Ultraviolet Spectroscopy and Polarimetry II, Silvano Fineschi; Ed.
Physics
Optics
Scientific paper
We have developed a new type of X-Ray spectrometer intended for light element micro-analysis applications. This spectrometer typically has energy resolution better than 20 eV, very high count rates for low X-Ray energies characteristic of light elements, quasi-parallel data collection similar to Energy Dispersive Spectroscopy (EDS), weighs less than 20 lb., and is mechanically very simple. Fabrication of this spectrometer is possible due to our development of X-Ray collection/collimation optics for low X- Ray energy which collect large solid angles of sub-KeV x-rays and reflect them into a parallel beam. The spectrometer is intended for electron beam microanalysis, small spot XRF and other X-Ray micro-analysis methods. In this paper, we present the theory of operation, some details of collimator fabrication, spectrometer fabrication and some preliminary test data.
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