A Modular High-Temperature Measurement Set-Up for Semiconductor Device Characterization

Details A Modular High-Temperature Measurement Set-Up for Semiconductor Device Characterization A Modular High-Temperature Measurement Set-Up for Semiconductor Device Characterization

2008-01-07

arxiv.org/abs/0801.1038v1

Dans 13th International Worshop on THERMal INvestigations of ICs and Systems - THERMINIC 2007, Budapest : Hongrie (2007)

Physics

General Physics

Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)

Scientific paper

We demonstrate the capabilities of a high temperature measurement set-up recently developed at our institute. It is dedicated to the characterization of semiconductor devices and test structures in the temperature range from room temperature up to 500 degrees C and higher. A detailed description of the experimental aquipment is given. Its practical use is demonstrated by measuring temperature-dependent charcteristics of silicon VDMOSFET and IGBT devices as well as SiC-diodes. For the silicon devices, numerical simulations based on recently developed high temperature physical models were also performed in order to gain a deeper understanding of the measured data, together with a revalidation of the model parameters.

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