Particle-in-cell simulations of rf breakdown

Details Particle-in-cell simulations of rf breakdown Particle-in-cell simulations of rf breakdown

2004-09-25

arxiv.org/abs/physics/0409131v1

Physics

Plasma Physics

12th International Congress on Plasma Physics, 25-29 October 2004, Nice (France)

Scientific paper

10.1088/0022-3727/38/6/027

Breakdown voltages of a capacitively coupled radio frequency argon discharge at 27 MHz are studied. We use a one-dimensional electrostatic PIC code to investigate the effect of changing the secondary emission properties of the electrodes on the breakdown voltage, particularly at low pd values. Simulation results are compared with the available experimental results and a satisfactory agreement is found.

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