Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection

Details Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection

2008-05-05

arxiv.org/abs/0805.0495v1

Physics

Optics

16 pages, 18 figures

Scientific paper

In this paper is considered a matter of the system for wafer defect
inspection (WDIS) practical realization. Such systems are on the agenda as the
next generation and substitution for light optics and single $e$-beam based
WDISs.

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