Computer analysis of interferograms by fitting quadratic forms.

Physics – Optics

Scientific paper

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Scientific paper

An exact algorithm for the automatic reduction of interferograms is proposed. It enables the evaluation of the surfaces of different shapes, for instance plane, spherical, cylindrical, ellipsoidal and hyperboloidal surfaces. The method deduces the geometrical shape of the surface under test, its deviation from perfection and its roughness. Measurements obtained from the recorded interferograms, which consist of fringe patterns indicative of the surface under test, are fed into a computer which reveals the information contained. This technique not only allows rapid and accurate interpretation, but also offers the possibility for use in optical metrology, as a tool for production control or quality inspection. Experimental demonstration and verification are presented. The resolution limit and range are given.

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