Physics
Scientific paper
Oct 2002
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002njph....4...76p&link_type=abstract
New Journal of Physics, Volume 4, Issue 1, pp. 76 (2002).
Physics
9
Scientific paper
The low-energy cluster beam deposition (LECBD) technique is used to deposit gold nanoclusters preformed in the gas phase on functionalized graphite substrates (highly oriented pyrolitic graphite (HOPG)), to prepare 2D-organized arrays of cluster assembled dots. Functionalized HOPG substrates are obtained using the focused ion beam (FIB) nanoengraving technique to pattern 2D-organized arrays of defects (nanoholes, nanobumps) which act as traps for the diffusing clusters. Depending on the deposition conditions (nature, size and fluence of the deposited clusters) and the functionalized substrates (nature and size of the FIB-induced defects, geometry of the 2D array of defects and temperature during deposition) high-quality quantum-dot arrays can be obtained with well controlled and reproducible morphologies. Kinetic Monte Carlo simulations of the cluster deposition experiments on functionalized substrates allow us to obtain quite good fits of the experimental images performed by tapping mode atomic force microscopy (TMAFM), leading to systematic investigations of the best conditions to realize high-quality quantum dots systems. This combined top-down-bottom-up approach (LECBD-FIB) seems a promising method for preparing high-integration-density devices (~Tbit cm-2) well suited for future applications to data storage, nanoelectronics, nano-optics, nanomagnetic systems.
Bardotti L.
Faini Giancarlo
Gierak J.
Jensen Pablo
Mailly Dominique
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