Physics – Optics
Scientific paper
Sep 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5454..148m&link_type=abstract
Micro-Optics: Fabrication, Packaging, and Integration. Edited by Van Daele, Peter; Mohr, Juergen. Proceedings of the SPIE, Vol
Physics
Optics
Scientific paper
The results of ellipsometric investigations of surfaces of glassceramic samples with ultra low coefficient of thermal expansion are presented. These glassceramic samples are used in manufacturing of precision parts of optical instruments, for instance for telescope mirrors manufacturing. The aim of these investigations was to study the influence of the surface damaged layer and elastic deformations on the residual ellipticity of polished surfaces of glassceramic samples with ultra low temperature expansion coefficient. It was shown that with increasing of the surface layer polished depth damaged by grinding, the residual ellipticity decreases up to the value that remains a constant. Its value is determined by the material structure and stresses in the surface layer.
Maslov Vladimir P.
Sarsembaeva Anna Z.
Sizov Feodor F.
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