Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta)

Details Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta) Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta)

Jul 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000jvstb..18.1949s&link_type=ejournal

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 18, issue 4, p. 1949

Physics

Scientific paper

Not Available

Affiliated with

Also associated with

No associations

Rating

Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta) does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta), we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Effect of ramp rate on the C49 to C54 titanium disilicide phase transformation from Ti and Ti(Ta) will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1730555