Thermodynamic Analysis of the High Temperature Processes in the System Si-C-H-Cl

Physics

Scientific paper

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Ceramics And Refractories, Thermal Analysis, Differential Thermal Analysis, Differential Thermogravimetric Analysis, Decomposition Reactions, Chemical Thermodynamics

Scientific paper

In the present work a thermodynamic analysis of the interaction
processes in the Si-C-H-Cl system in the temperature interval 1000-3000
K is carried out. The optimal conditions giving the maximum yield of the
silicon carbide by pyrolysis of mixture of volatile compounds of carbon
and silicon have been defined.

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