The Realization of a Eximer Laser Source With High Intensity

Details The Realization of a Eximer Laser Source With High Intensity The Realization of a Eximer Laser Source With High Intensity

Apr 2007

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007aipc..899..337v&link_type=abstract

SIXTH INTERNATIONAL CONFERENCE OF THE BALKAN PHYSICAL UNION. AIP Conference Proceedings, Volume 899, pp. 337-338 (2007).

Physics

Gas Lasers Including Excimer And Metal-Vapor Lasers, Beam Characteristics: Profile, Intensity, And Power, Spatial Pattern Formation

Scientific paper

Eximer Lasers are gas Laser of diatomic molecules. The Laser source requested to be realized has KrF as eximer (the krypton is a rare gas and fluoride is a halogen). The atoms Kr and F are tied only when they are excited, while they are being separated when the molecule is unexcited. Partial pressures in the discharge room are : for Kr 160 mbar, and for F 4 mbar. A third gas such as neon (buffer gas) is inserted into the cell; its pressure is 3 bar. The main characteristics of this Laser source are: wavelength of emitted laser light: 248 nm; energy per one Laser impulse : 0,1 J; duration of a Laser impulse: 0,1 ns.

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