REVIEW ARTICLE: Electron lithography for the fabrication of microelectronic devices

Details REVIEW ARTICLE: Electron lithography for the fabrication of microelectronic devices REVIEW ARTICLE: Electron lithography for the fabrication of microelectronic devices

Jun 1985

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1985rpph...48..795o&link_type=ejournal

Reports on Progress in Physics, Volume 48, Issue 6, pp. 795-851 (1985).

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