On An RF Discharge With An Adaptive Electrode For Powder Treatment

Details On An RF Discharge With An Adaptive Electrode For Powder Treatment On An RF Discharge With An Adaptive Electrode For Powder Treatment

Oct 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..411t&link_type=abstract

NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum

Physics

Dusty Plasmas, High-Frequency Discharges, Plasma Diagnostics, Plasma Sheaths, Dusty Or Complex Plasmas, Plasma Crystals, High-Frequency And Rf Discharges

Scientific paper

The plasma near an adaptive electrode of an asymmetric capacitively coupled RF discharge (13.56 MHz) in argon for powder treatment was studied at different pressures and RF powers. The plasma parameters as electron density, electron temperature, and plasma potential were determined by means of Langmuir probe measurements. The different ions and their kinetic energy at the wall were measured by energy resolved mass spectrometry. The influence of biased segments on the plasma, on the positioning of melamin formaldehyde (MF) particles, and on their vertical resonance frequency was investigated.

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