Zone plate interferometer for testing aspherical surfaces

Details Zone plate interferometer for testing aspherical surfaces Zone plate interferometer for testing aspherical surfaces

Aug 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3557..317x&link_type=abstract

Proc. SPIE Vol. 3557, p. 317-321, Current Developments in Optical Elements and Manufacturing, Qiming Xin; Robert E. Parks; Eds.

Physics

Scientific paper

The recent development and application of the technique of using zone plate interferometry to test aspherical surfaces are summarized. The advantages and disadvantages of several types of zone-plate interferometer are given. The principle and method for testing aspherical surfaces using a modified zone-plane (MZP) are described. The relation between installation of MZP and measurement precision is analyzed. The design of MZP is modified to eliminate the curvature at the border of the interference pattern. At last, some experimental results are given.

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