Physics
Scientific paper
Feb 2011
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011spie.7928e...3n&link_type=abstract
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. Edited by Garcia-Blanco, Sonia; Ramesham
Physics
Scientific paper
Various shapes of microlens arrays (MLAs) were developed by utilizing polymer coating on etched quartz substrates. Spherical and non-spherical plano-concave curvatures were realized via isotropic wet etching of quartz in buffered oxide etchant (BOE), based on diverse design parameters and calculated etching times. The fabricated curvatures showed a high fill-factor and uniform elements in the array. By coating a higher refractive index polymer on the etched quartz, the illuminated light was well focused at the focal plane forming a micronscale light spot array. The experimental focal length was increased from 39.8 to 49.6 μm, as the shape of microlens was flattened. These results well correspond to those obtained from an optical simulation.
Kim Geunyoung
Lee Kee-Keun
Nam Minwoo
Oh Haekwan
Seo Hyunwoo
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