The Mems Project

Details The Mems Project The Mems Project

Jun 2008

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008apsp.conf...28b&link_type=abstract

ASTROPARTICLE, PARTICLE AND SPACE PHYSICS, DETECTORS AND MEDICAL PHYSICS APPLICATIONS. Proceedings of the 10th Conference. Held

Physics

Medical Physics

Scientific paper

We report on the results of the first three years of the INFN/FBK-irst
"MEMS Project", a program aiming to develop innovative silicon based
radiation detectors using MEMS-like technologies.

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