Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy

Details Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy

2009-07-22

arxiv.org/abs/0907.3809v1

Nucl.Instrum.Meth.A608:363-365,2009

Physics

Instrumentation and Detectors

6 pages, 3 figures, submitted to Nucl. Instr. Meth. A

Scientific paper

10.1016/j.nima.2009.07.017

A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CMOS sensor with 9.5 micron pixels show an improvement of a factor of two in point spread function to 2.7 micron at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination.

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