Physics – Optics
Scientific paper
Jan 1993
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..365s&link_type=abstract
In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San
Physics
Optics
1
Laminates, Metal Films, Molybdenum, Silicon, X Ray Diffraction, X Ray Scattering, Solid-Solid Interfaces, Substrates, Surface Roughness
Scientific paper
A variety of low-angle X-ray diffraction (LAXRD) techniques are applied to the characterization of Si/Mo multilayers with the aim of developing nonspecular X-ray scattering as a characterization tool. Multilayers were sputter-deposited at different pressures in order to produce a wide variation in the intrinsic interface roughness. For each sample, four types of LAXRD measurements were performed: 0-20 (specular), offset 0-20, rocking curves (RCs), and scatter curves (SCs). In an offset 0-20 scan, the sample is misaligned just off the specular peak in order to measure the diffuse component of the 0-20 spectrum. These scans show that the diffuse scattering is modulated in a way similar to the specular. RCs taken on low-angle Bragg peak positions are characterized by a sharp specular spike on top of a broad diffuse hump. For an SC, the incident angle is held fixed and the detector swept. Structural parameters, such as spatial frequencies of the correlated roughness and a coherence length for the correlations, are determined.
Falco Charles M.
Slaughter J. M.
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