W/C multilayers deposited on plastic films

Details W/C multilayers deposited on plastic films W/C multilayers deposited on plastic films

Jan 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..309s&link_type=abstract

In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San

Physics

Optics

Laminates, Metal Films, Polyimide Resins, Polymeric Films, Vapor Deposition, Carbon, Surface Roughness, Transmission Electron Microscopy, Tungsten

Scientific paper

W/C multilayers were deposited on plastic films, which had thin thickness and light weight. TEM images showed the surface roughness of the plastic films and the boundary roughness of the multilayers. X-ray reflectivities were measured at wavelengths of 0.154 nm, 0.834 nm, and 0.3 to 0.7 nm. The boundary roughness values of the multilayers deposited on a polyimide film and a Si wafer were estimated to be 1.2 nm and 0.7 nm, respectively.

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