Physics
Scientific paper
Sep 2002
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4919..227s&link_type=abstract
Advanced Materials and Devices for Sensing and Imaging. Edited by Yao, Jianquan; Ishii, Yukihiro. Proceedings of the SPIE, Volu
Physics
Scientific paper
An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.
Honma Kunihiro
Sasaki Osami
Suzuki Takamasa
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