Data reduction of Shack-Hartmann mirror surface analyzer.

Physics – Optics

Scientific paper

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Mirrors: Active Optics

Scientific paper

Data acquisition and reduction algorithm of Shack-Hartmann sensor for
measuring the shape of a thin meniscus mirror actively supported by
actuators are presented. The least square method is adopted to determine
the expansion coefficients of the mirror surface by fitting the spot
displacements to the differentials of Zernike polynomials.

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